Special Session CJ-6
State-of-the-art Development and Application of Thin Film Piezoelectric MEMS/NEMS
Programme Chairs:
Massimo DE VITTORIO, University of Salento, Italy
Members:
Vladimir A. AKSYUK, NIST, USA
Seung-Hyub BAEK, KIST, Korea
Nazanin BASSIRI-GHARB, Georgia Institute of Technology, USA
Nico DE ROOIJ, EPF - IMT, Switzerland
Chang-Beom EOM, University of Wisconsin-Madison, USA
Marc FAUCHER, Université de Lille, France
Vittorio FERRARI, University of Brescia, Italy
Hiroshi FUNAKUBO, Tokyo Institute of Technology, Japan
Reza GHODSSI, University of Maryland, USA
Isaku KANNO, Kobe University, Japan
Chih-Kung LEE, National Taiwan University, Taiwan
Xinxin LI, Shanghai Inst.of Microsystem & Inf. Tech., CAS, China
Ryutaro MAEDA, UMEMSME / AIST, Japan
Gianluca PIAZZA, Carnegie Mellon University, USA
Ronald G. POLCAWICH, US Army Research Laboratory, USA
Denis REMIENS, Université de Valenciennes, France
Srinivas TADIGADAPA, Pennsylvania State University, USA
Ruud VULLERS, imec - Holst Centre, Netherlands
Massimo DE VITTORIO, University of Salento, Italy
Members:
Vladimir A. AKSYUK, NIST, USA
Seung-Hyub BAEK, KIST, Korea
Nazanin BASSIRI-GHARB, Georgia Institute of Technology, USA
Nico DE ROOIJ, EPF - IMT, Switzerland
Chang-Beom EOM, University of Wisconsin-Madison, USA
Marc FAUCHER, Université de Lille, France
Vittorio FERRARI, University of Brescia, Italy
Hiroshi FUNAKUBO, Tokyo Institute of Technology, Japan
Reza GHODSSI, University of Maryland, USA
Isaku KANNO, Kobe University, Japan
Chih-Kung LEE, National Taiwan University, Taiwan
Xinxin LI, Shanghai Inst.of Microsystem & Inf. Tech., CAS, China
Ryutaro MAEDA, UMEMSME / AIST, Japan
Gianluca PIAZZA, Carnegie Mellon University, USA
Ronald G. POLCAWICH, US Army Research Laboratory, USA
Denis REMIENS, Université de Valenciennes, France
Srinivas TADIGADAPA, Pennsylvania State University, USA
Ruud VULLERS, imec - Holst Centre, Netherlands
Seung-Hyub BAEK, KIST, Korea
Emmanuel DEFAY, CEA, LETI, France
Chang-Beom EOM, University of Wisconsin-Madison, USA
Vittorio FERRARI, university of Brescia, Italy
Sang-Gook KIM, MIT, USA
Takeshi KOBAYASHI, AIST, Japan
Swee Leong KOK, University of Technical Malaysia Melaka, Malaysia
Paul MURALT, EPFL, Switzerland
Dennis NEWNS, IBM TJ Watson Research Center, USA
Erling RINGGARD/Wanda WOLNY, Meggitt, Denmark
Susan TROLIER-McKINSTRY, Penn State University, USA
Frode TYHOLDT, Sintef, Norway
Pavlo ZUBKO, University College London, UK/Jean-Marc TRISCONE, Univ.de Geneve, Switzerland
Emmanuel DEFAY, CEA, LETI, France
Chang-Beom EOM, University of Wisconsin-Madison, USA
Vittorio FERRARI, university of Brescia, Italy
Sang-Gook KIM, MIT, USA
Takeshi KOBAYASHI, AIST, Japan
Swee Leong KOK, University of Technical Malaysia Melaka, Malaysia
Paul MURALT, EPFL, Switzerland
Dennis NEWNS, IBM TJ Watson Research Center, USA
Erling RINGGARD/Wanda WOLNY, Meggitt, Denmark
Susan TROLIER-McKINSTRY, Penn State University, USA
Frode TYHOLDT, Sintef, Norway
Pavlo ZUBKO, University College London, UK/Jean-Marc TRISCONE, Univ.de Geneve, Switzerland
With the continuous trend of microelectromechanical systems (MEMS) to scaling down to smaller sizes and increased integration density, new materials approaches are explored to meet the demand for newer and more efficient devices. Piezoelectric ceramics thin films and heterostructures, especially those based on wurtzite and perovskite systems, are being identified as promising options to possibly overcome some limits of electrostatically-actuated micro- and nanomechanical structures, in virtue of their effectiveness in providing the adequate linear forces, fast actuation, high displacements at small drive voltages, high integration capability and low power consumption for the realisation of efficient MEMS/NEMS devices.
This Special Session aims at enlightening the state-of-the-art of thin-film piezoelectric MEMS/NEMS, including key materials, growth of piezoelectric thin films and emerging microfabrication techniques for the realisation of highly integrated reliable MEMS/NEMS devices suitable for a broad range of ongoing and prospective applications.
This Special Session aims at enlightening the state-of-the-art of thin-film piezoelectric MEMS/NEMS, including key materials, growth of piezoelectric thin films and emerging microfabrication techniques for the realisation of highly integrated reliable MEMS/NEMS devices suitable for a broad range of ongoing and prospective applications.
Session Topics
CJ-6.1 New piezomaterials systems, film growth, multilayers, heterostructures, characterisation
CJ-6.2 Microfabrication, device design
CJ-6.3 Thin film piezoelectric MEMS / NEMS applications